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The control of resonant metasurface for electromagnetically induced transparency (EIT) offers unprecedented opportunities to tailor lightwave coupling at the nanoscale leading to many important applications including slow light devices, optical filters, chemical and biosensors. However, the realization of EIT relies on the high degree of structural asymmetry by positional displacement of optically resonant structures, which usually lead to low quality factor (Q-factor) responses due to the light leakage from structural discontinuity from asymmetric displacements. In this work, we demonstrate a new pathway to create high quality EIT metasurface without any displacement of constituent resonator elements. The mechanism is based on the detuning of the resonator modes which generate dark-bright mode interference by simply introducing a slot in metasurface unit cells (meta-atoms). More importantly, the slot diameter and position on the meta-atom can be modulated to tune the transmittance and quality factor (Q-factor) of the metasurface, leading to a Q-factor of 1190 and near unity transmission at the same time. Our work provides a new degree of freedom in designing optically resonant elements for metamaterials and metasurfaces with tailored wave propagation and properties.more » « less
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